Process for producing amorphous and crystalline silicon nitride
Patent
·
OSTI ID:7256900
A process for producing amorphous or crystalline silicon nitride is disclosed which comprises reacting silicon disulfide ammonia gas at elevated temperature. In a preferred embodiment silicon disulfide in the form of whiskers'' or needles is heated at temperature ranging from about 900 C to about 1,200 C to produce silicon nitride which retains the whisker or needle morphological characteristics of the silicon disulfide. Silicon carbide, e.g. in the form of whiskers, also can be prepared by reacting substituted ammonia, e.g. methylamine, or a hydrocarbon containing active hydrogen-containing groups, such as ethylene, with silicon disulfide, at elevated temperature, e.g. 900 C. 6 figs.
- Research Organization:
- Rockwell International Corp
- DOE Contract Number:
- AC03-78ER01885
- Assignee:
- Rockwell International Corp., El Segundo, CA (United States)
- Patent Number(s):
- US 4552740; A
- Application Number:
- PPN: US 6-704979
- OSTI ID:
- 7256900
- Country of Publication:
- United States
- Language:
- English
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