Secondary-ion image-depth profiling

Thesis/Dissertation · Tue Dec 31 23:00:00 EST 1985

OSTI ID:7243242

Bryan, S R

A microcomputer-based digital imaging system was developed for a Cameca IMS-3f ion microscope permitting real-time digital acquisition of secondary ion images. Successive image frames can be summed at video rates (30 frames/s) to enhance image signal-to-noise. The digital images are displayed on a RGB color monitor. Image processing software was written which allows off-line image enhancement and multitechnique digital image correlations. One of the most significant improvements in analytical capability made possible by the addition of a digital imaging system is the ability to acquire image-depth profiles. By combining the ion microscope's capabilities of elemental imaging and depth profiling, secondary-ion image-depth profiling provides information on the 3-dimensional distribution of elements within the near surface region of solids. A new method of acquiring image depth profiles was developed that substantially extends the dynamic range of the technique by automatically optimizing the detector gain and acquisition time for each individual image. Finally, a method for removing the ion-yield transient from the beginning of SIMS depth profiles is evaluated. The method is used to generate anion-yield correction function for B/sup +/ and B/sup -/ transients in Si.

• Research Organization: North Carolina Univ., Chapel Hill (USA)
• OSTI ID: 7243242
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102 -- Chemical & Spectral Procedures
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
99 GENERAL AND MISCELLANEOUS
990210 -- Supercomputers-- (1987-1989)
BEAMS
CHEMICAL ANALYSIS
COMPUTER GRAPHICS
DIGITAL SYSTEMS
IMAGE INTENSIFIERS
IMAGES
ION MICROPROBE ANALYSIS
ION MICROSCOPES
MASS SPECTROSCOPY
MICROANALYSIS
MICROSCOPES
NONDESTRUCTIVE ANALYSIS
PARTICLE BEAMS
SECONDARY BEAMS
SPECTROSCOPY