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Depth profiles of deuterium in titanium from gas emission during sputtering

Conference ·
OSTI ID:7192484
A simple technique for the determination of the depth distributions of deuterium and tritium in the near-surface region (0-1..mu..m) of materials has been demonstrated. In particular, the depth distribution of deuterium in a layered, deuterided titanium film has been determined by monitoring the HD and D/sub 2/ gas emissions during sputtering by 2 keV argon ions. For the nonoptimized conditions employed the detection sensitivity was D/Ti approximately 0.02 and the fractional depth resolution was approximately 0.24 (i.e., approximately 240A for a 1000A film). Even for these conditions, this technique has a near-surface depth resolution superior, or equal, to that of other techniques for profiling hydrogen and a more than adequate sensitivity for the detection of deuterium and tritium in CTR-related studies, hydride studies, and studies of tritided targets for neutron production.
Research Organization:
Sandia Labs., Livermore, Calif. (USA)
DOE Contract Number:
AT(29-1)-789
OSTI ID:
7192484
Report Number(s):
SAND-75-8754; CONF-760209-24
Country of Publication:
United States
Language:
English