Electron Cyclotron Resonance Deposition of Amorphous Silicon Alloy Films and Devices, Final Subcontract Report, 1 April 1991 - 31 March 1992
This report describes work to develop a state-of-the-art electron cyclotron resonance (ECR) plasma-enhanced chemical vapor deposition (PECVD) system. The objective was to understand the deposition processes of amorphous silicon (a-Si:H) and related alloys, with a best-effort improvement of optoelectronic material properties and best-effort stabilization of solar cell performance. ECR growth parameters were systematically and extensively investigated; materials characterization included constant photocurrent measurement (CPM), junction capacitance, drive-level capacitance profiling (DLCP), optical transmission, light and dark photoconductivity, and small-angle X-ray scattering (SAXS). Conventional ECR-deposited a-Si:H was compared to a new form, a-Si:(Xe, H), in which xenon gas was added to the ECR plasma. a-Si:(Xe,H) possessed low, stable dark conductivities and high photosensitivites. Light-soaking revealed photodegradation rates about 35% lower than those of comparable radio frequency (rf)-deposited material. ECR-deposited p-type a SiC:H and intrinsic a-Si:H films underwent evaluation as components of p-i-n solar cells with standard rf films for the remaining layers.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- DOE Contract Number:
- AC36-08GO28308;
- OSTI ID:
- 7189217
- Report Number(s):
- NREL/TP-411-5123; ON: DE93000023
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
360601 -- Other Materials-- Preparation & Manufacture
amorphous silicon
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CYCLOTRON RESONANCE
deposition
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
ELECTRON CYCLOTRON-RESONANCE
electronic devices
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
PERFORMANCE TESTING
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
photovoltaics
PROGRESS REPORT
RESONANCE
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TEMPERATURE DEPENDENCE
TESTING
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
360601 -- Other Materials-- Preparation & Manufacture
amorphous silicon
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CYCLOTRON RESONANCE
deposition
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
ELECTRON CYCLOTRON-RESONANCE
electronic devices
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
PERFORMANCE TESTING
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
photovoltaics
PROGRESS REPORT
RESONANCE
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TEMPERATURE DEPENDENCE
TESTING