Electron Cyclotron Resonance Deposition of Amorphous Silicon Alloy Films and Devices, Final Subcontract Report, 1 April 1991 - 31 March 1992
This report describes work to develop a state-of-the-art electron cyclotron resonance (ECR) plasma-enhanced chemical vapor deposition (PECVD) system. The objective was to understand the deposition processes of amorphous silicon (a-Si:H) and related alloys, with a best-effort improvement of optoelectronic material properties and best-effort stabilization of solar cell performance. ECR growth parameters were systematically and extensively investigated; materials characterization included constant photocurrent measurement (CPM), junction capacitance, drive-level capacitance profiling (DLCP), optical transmission, light and dark photoconductivity, and small-angle X-ray scattering (SAXS). Conventional ECR-deposited a-Si:H was compared to a new form, a-Si:(Xe, H), in which xenon gas was added to the ECR plasma. a-Si:(Xe,H) possessed low, stable dark conductivities and high photosensitivites. Light-soaking revealed photodegradation rates about 35% lower than those of comparable radio frequency (rf)-deposited material. ECR-deposited p-type a SiC:H and intrinsic a-Si:H films underwent evaluation as components of p-i-n solar cells with standard rf films for the remaining layers.
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE)
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 7189217
- Report Number(s):
- NREL/TP-411-5123; ON: DE93000023
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ELECTRON CYCLOTRON-RESONANCE
SILICON
CHEMICAL VAPOR DEPOSITION
SILICON SOLAR CELLS
FABRICATION
AMORPHOUS STATE
CRYSTAL DEFECTS
FILMS
PERFORMANCE TESTING
PROGRESS REPORT
TEMPERATURE DEPENDENCE
CHEMICAL COATING
CRYSTAL STRUCTURE
CYCLOTRON RESONANCE
DEPOSITION
DIRECT ENERGY CONVERTERS
DOCUMENT TYPES
ELEMENTS
EQUIPMENT
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RESONANCE
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
TESTING
photovoltaics
solar cells
amorphous silicon
films
electronic devices
deposition
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture