Formation of copper patterns on poly(tetrafluoroethylene) via radiation controlled chemical etching and chemical-vapor deposition

Journal Article · Tue Dec 15 00:00:00 EST 1992 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.351902· OSTI ID:7183551

Rye, R R; Knapp, J A ^[1]; Chi, K; Hampden-Smith, M J ^[2]; Kodas, T T ^[3]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)
2. Department of Chemistry, University of New Mexico, Albuquerque, New Mexico 87131 (United States)
3. Department of Chemical Engineering, University of New Mexico, Albuquerque, New Mexico 87131 (United States)

Patterned copper films have been deposited on poly(tetrafluoroethylene) (PTFE) in a three-step additive process. In the first step, a pattern is produced by cross linking the PTFE surface in selected areas by irradiation with either electrons or x rays at dose levels below those that are either visually or spectroscopically apparent. The pattern is then developed by wet chemical etching in the second step in which only the nonirradiated areas are appreciably etched with sodium naphthalenide. In the final step, chemical-vapor deposition using the precursor (hexafluoroacetylacetonato) Cu[sup (I)] trimethylphosphine at 200 [degree]C results in Cu deposition only on the nonirradiated areas of the surface. The Cu films are continuous with a resistivity of 4 [mu][Omega] cm, high purity as determined by Auger electron spectroscopy and x-ray photoelectron spectroscopy, and are sufficiently adherent to survive a Scotch tape test. Patterned feature sizes as small as 35 [mu]m can be produced.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 7183551
• Journal Information: Journal of Applied Physics; (United States), Vol. 72:12; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COPPER
CHEMICAL VAPOR DEPOSITION
ELECTRIC CONDUCTORS
THIN FILMS
POLYMERS
ETCHING
ELECTRIC CONDUCTIVITY
ELECTRONS
FABRICATION
PHYSICAL RADIATION EFFECTS
X RADIATION
CHEMICAL COATING
DEPOSITION
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FILMS
IONIZING RADIATIONS
LEPTONS
METALS
PHYSICAL PROPERTIES
RADIATION EFFECTS
RADIATIONS
SURFACE COATING
SURFACE FINISHING
TRANSITION ELEMENTS
360101* - Metals & Alloys- Preparation & Fabrication
360601 - Other Materials- Preparation & Manufacture