Mechanical properties of epitaxial TiN/(V[sub 0. 6]Nb[sub 0. 4])N superlattices measured by nanoindentation

Journal Article · Sun Nov 01 04:00:00 EST 1992 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.352177· OSTI ID:7183272

Hubbard, K M; Jervis, T R ^[1]; Mirkarimi, P B; Barnett, S A ^[2]

---

1. Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
2. Northwestern University, Evanston, Illinois 60208 (United States)

We have used nanoindentation to measure the mechanical properties of epitaxial TiN/(V[sub 0.6]Nb[sub 0.4])N superlattices, grown on MgO(100), as a function of the wavelength [lambda]. The V/Nb ratio within the VNbN layers was chosen to provide a lattice match with TiN, minimizing effects resulting from coherency strains. For [lambda][ge]4 nm, the hardness was found to be significantly enhanced relative to a homogeneous reference film of the same average composition. For [lambda][lt]4 nm, the hardness decreased to a value close to that of the reference film. The elastic modulus was found to be constant for [lambda][ge]4nm, at a value close to that predicted by the law of mixtures. For samples with [lambda]=2.3 and 2.8 nm, there was a 15% decrease in modulus. The observed variations appear not to be an effect of interfacial strain. Possible mechanisms are discussed.

• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 7183272
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 72:9; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360103* -- Metals & Alloys-- Mechanical Properties
COHERENT SCATTERING
DIFFRACTION
ELASTICITY
HARDNESS
MECHANICAL PROPERTIES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SCATTERING
SUPERLATTICES
TENSILE PROPERTIES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM NITRIDES
X-RAY DIFFRACTION