Enhanced hardness in lattice-matched single-crystal TiN/V sub 0. 6 Nb sub 0. 4 N superlattices

Journal Article · Mon Dec 17 04:00:00 EST 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104189· OSTI ID:6259102

Mirkarimi, P B; Hultman, L; Barnett, S A ^[1]

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1. Department of Materials Science, Northwestern University, Evanston, IL 60208 (USA)

Single-crystal TiN/V{sub 0.6}Nb{sub 0.4}N superlattice films were deposited on MgO(100) substrates using ultrahigh vacuum reactive sputtering from two magnetron sources with a computer-controlled shutter. X-ray diffractometer measurements showed first- and second-order superlattice peaks while electron diffraction showed up to seventh-order superlattice reflections. Direct observations using cross-sectional transmission electron microscopy showed that the superlattices had flat, abrupt interfaces, but contained threading dislocations. Microhardness values for the superlattices ranged from to 3100 to 4100 kg/mm{sup 2}, depending on the superlattice period ({lambda}), compared with 1500 for an alloy with equal average composition. The hardness values for these lattice-matched superlattices agreed with those previously reported for TiN/VN superlattices with a lattice mismatch of 2.4%, although the hardness peak was less pronounced. The present results indicate that coherency strains do not play the major role in enhancing the hardness of these nitride superlattices.

• OSTI ID: 6259102
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:25; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CHEMICAL COMPOSITION
COHERENT SCATTERING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CRYSTALS
DATA
DIFFRACTION
DISLOCATIONS
ELECTRON MICROSCOPY
EXPERIMENTAL DATA
FABRICATION
HARDNESS
INFORMATION
LINE DEFECTS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSCOPY
MONOCRYSTALS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SCATTERING
SPUTTERING
STRAINS
SUPERLATTICES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
VANADIUM COMPOUNDS
VANADIUM NITRIDES
X-RAY DIFFRACTION