Deposition and properties of polycrystalline TiN/NbN superlattice coatings

Journal Article · Wed Jul 01 04:00:00 EDT 1992 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578030· OSTI ID:7202926

Chu, X ^[1]; Wong, M S; Sproul, W D; Rohde, S L ^[2]; Barnett, S A ^[1]

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1. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
2. BIRL, Northwestern University, Evanston, Illinois 60201-3135 (United States)

Polycrystalline TiN/NbN superlattice coatings were deposited on M2 tool steel substrates using an opposed dual-cathode unbalanced magnetron sputtering system. Superlattice deposition was achieved by placing the substrates on a cylindrical holder that rotated on an axis equidistant between, and parallel to, the faces of opposed Ti and Nb targets. Cross contamination of the targets and the alternating superlattice layers was minimized using a baffle or an extra-large cylindrical substrate holder. The superlattice period was determined by the substrate holder rotation speed. Analytical techniques including x-ray diffraction, energy-dispersive spectroscopy and transmission electron microscopy were used to characterize the structure of the superlattice coatings. Microhardness values for the superlattice coatings as high as 5200 kg/mm{sup 2} Hv{sub 0.05} have been achieved, comparable to the reported highest hardness values of single crystal TiN/VN, TiN/V{sub 0.6}Nb{sub 0.4}N and TiN/NbN superlattice coatings. The results indicate that the hardness of the polycrystalline TiN/NbN superlattice coatings is affected not only by superlattice period, but also by nitrogen partial pressure and ion bombardment during deposition.

• DOE Contract Number: FG02-90ER45434
• OSTI ID: 7202926
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 10:4; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ALLOYS
BEAMS
COATINGS
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
ELEMENTS
HARDNESS
ION BEAMS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
PARTIAL PRESSURE
PNICTIDES
POLYCRYSTALS
REFRACTORY METAL COMPOUNDS
SPUTTERING
STEELS
SUPERLATTICES
SURFACE COATING
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS