Deposition and properties of novel nitride superlattice coatings

Technical Report · Sun Dec 01 04:00:00 EST 1991

DOI:https://doi.org/10.2172/5917826· OSTI ID:5917826

Barnett, S A; Sproul, W D

We have demonstrated that polycrystalline TiN/NbN superlattice thin films on tool steel substrates can have hardnesses H as high as 5200 kg mm{sup {minus}2} HV{sub 0.05} (52 Gpa). This is more than twice the hardness of polycrystalline sputtered TiN and NbN deposited using the same conditions, and matches the highest H observed for single-crystal TiN/NbN superlattices. Initial parametric studies showed that H increased with decreasing superlattice period down to 4 nm, similar to the dependence for single-crystal TiN/NbN. These results are the first indication that polycrystalline superlattices with high hardness can be deposited on practical substrates.

• Research Organization: Northwestern Univ., Evanston, IL (United States)
• Sponsoring Organization: DOE; USDOE, Washington, DC (United States)
• DOE Contract Number: FG02-90ER45434
• OSTI ID: 5917826
• Report Number(s): DOE/ER/45434-1; ON: DE92007548
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360203 -- Ceramics
Cermets
& Refractories-- Mechanical Properties
DEPOSITION
DOCUMENT TYPES
FILMS
HARDNESS
MECHANICAL PROPERTIES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
PROGRESS REPORT
REFRACTORY METAL COMPOUNDS
SUPERLATTICES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS