Deposition and properties of novel nitride superlattice coatings. Progress report, September 27, 1990--May 27, 1992
We have demonstrated that polycrystalline TiN/NbN superlattice thin films on tool steel substrates can have hardnesses H as high as 5200 kg mm{sup {minus}2} HV{sub 0.05} (52 Gpa). This is more than twice the hardness of polycrystalline sputtered TiN and NbN deposited using the same conditions, and matches the highest H observed for single-crystal TiN/NbN superlattices. Initial parametric studies showed that H increased with decreasing superlattice period down to 4 nm, similar to the dependence for single-crystal TiN/NbN. These results are the first indication that polycrystalline superlattices with high hardness can be deposited on practical substrates.
- Research Organization:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- FG02-90ER45434
- OSTI ID:
- 10122029
- Report Number(s):
- DOE/ER/45434--1; ON: DE92007548
- Country of Publication:
- United States
- Language:
- English
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