Si deposition from chlorosilanes; 1: Deposition modeling
Journal Article
·
· Journal of the Electrochemical Society; (United States)
- Northeastern Univ., Boston, MA (United States). Dept. of Mechanical Engineering
Deposition of silicon from chlorosilanes is studied. Based on a model for gas-phase reactions involving SiCl[sub 4], SiHCl[sub 3], SiCl[sub 2], and HCl, the reaction constants for relevant gas-phase reactions are determined. Deposition is analyzed in two ways: one (effusive flux model) using the surface reaction probabilities of surface reactions, and the other (surface reaction model) derived previously by Korea in terms of surface reactions of SiCl[sub 2]. Advantages as well as disadvantages of the two models are discussed by comparing fully numerical results with the experimental results available.
- OSTI ID:
- 7181499
- Journal Information:
- Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 141:8; ISSN JESOAN; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CHEMICAL COATING
CHEMICAL REACTION KINETICS
CHEMICAL VAPOR DEPOSITION
CHLORIDES
CHLORINE COMPOUNDS
DEPOSITION
ELEMENTS
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
MANUFACTURING
MATHEMATICAL MODELS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SEMICONDUCTOR DEVICES
SEMIMETALS
SILANES
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS
SILICON HALIDES
SURFACE COATING
360601* -- Other Materials-- Preparation & Manufacture
CHEMICAL COATING
CHEMICAL REACTION KINETICS
CHEMICAL VAPOR DEPOSITION
CHLORIDES
CHLORINE COMPOUNDS
DEPOSITION
ELEMENTS
HALIDES
HALOGEN COMPOUNDS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
MANUFACTURING
MATHEMATICAL MODELS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC SILICON COMPOUNDS
REACTION KINETICS
SEMICONDUCTOR DEVICES
SEMIMETALS
SILANES
SILICON
SILICON CHLORIDES
SILICON COMPOUNDS
SILICON HALIDES
SURFACE COATING