Single liquid-source plasma enhanced metalorganic chemical vapor deposition of YBa sub 2 Cu sub 3 O sub 7-x thin films. Technical report

Technical Report · Wed Jul 29 04:00:00 EDT 1992

OSTI ID:7162901

Zhang, J; Gardiner, R; Kirlin, P S; Boerstler, R W; Steinbeck, J

High quality YBa2Cu3O7-x films were grown in-situ on LaAlO3 (100) by a novel single liquid source plasma-enhanced metalorganic chemical vapor deposition process. The metalorganic complexes M(thd)n, (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate; M = Y, Ba, Cu) were dissolved in an organic solution and injected into a vaporizer immediately upstream of the reactor inlet The single liquid source technique dramatically simplifies current CVD processing and can significantly improve the process reproducibility. X-ray diffraction. measurements indicated that single phase, highly c-axis oriented YBa2Cu3O7-x was formed in-situ at a substrate temperature 680 degC. The as-deposited films exhibited a mirror-like surface, had transition temperature Tc = 89 K, Delta Tc < 1K, and Jc(77K) = 106 A/cm2. Plasma enhanced metalorganic chemical vapor deposition, YBCO, superconductors.

• Research Organization: Advanced Technology Materials, Inc., Danbury, CT (United States)
• OSTI ID: 7162901
• Report Number(s): AD-A-254119/1/XAB; ATM--52; CNN: N00014-90-C-0201
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
&amp; Refractories-- Preparation &amp; Fabrication
360207 -- Ceramics
Cermets
&amp; Refractories-- Superconducting Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CARBIDES
CARBON COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
DEPOSITION
DIFFRACTION
ELECTRIC CURRENTS
FABRICATION
FILMS
FLUIDS
GASES
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
SEMICONDUCTOR DEVICES
SILICON CARBIDES
SILICON COMPOUNDS
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
SURFACES
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPORS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES