Volatile barium. beta. -diketonate polyether adducts. Synthesis, characterization, and metalloorganic chemical vapor deposition

Journal Article · · Chemistry of Materials; (United States)

DOI:https://doi.org/10.1021/cm00018a020· OSTI ID:7238064

Gardiner, R; Brown, D W; Kirlin, P S ^[1]; Rheingold, A L ^[2]

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1. Advanced Technology Materials, Inc., Danbury, CT (United States)
2. Univ. of Delaware, Newark (United States)

The 2,5,8,11,14-pentaoxopentadecane (tetraglyme) adducts of barium complexes of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H(hfacac)), 1,1,1-trifluoro-2,4-pentanedione (H(tfacac)), and 2,2,6,6-tetramethyl-3,5-heptanedione (H(thd)) have been prepared and characterized by X-ray crystallography, {sup 1}H and {sup 13}C NMR spectroscopies, melting and sublimation points, and elemental analysis. The thermal stability of the complexes is related to their solid-state structure in which the coordination number around the barium atom is nine with a monocapped, twisted square prism structure. Metalloorganic chemical vapor deposition experiments were performed using the 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato and 1,1,1-trifluoro-2,4-pentanedionato complexes; the 2,2,6,6-tetramethyl-3,5-heptanedionate complex dissociated prior to sublimation. The as-deposited barium fluoride films were characterized by scanning electron microscopy and energy-dispersive X-ray spectroscopy.

• OSTI ID: 7238064
• Journal Information: Chemistry of Materials; (United States), Journal Name: Chemistry of Materials; (United States) Vol. 3:6; ISSN CMATE; ISSN 0897-4756
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
ALCOHOLS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM FLUORIDES
CARBON 13
CARBON ISOTOPES
CHEMICAL COATING
CHEMICAL PREPARATION
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
DATA
DEPOSITION
DIFFRACTION
ELECTRON MICROSCOPY
EVAPORATION
EVEN-ODD NUCLEI
EXPERIMENTAL DATA
FILMS
FLUORIDES
FLUORINE COMPOUNDS
GLYCOLS
HALIDES
HALOGEN COMPOUNDS
HYDROXY COMPOUNDS
INFORMATION
ISOTOPES
KETONES
LATTICE PARAMETERS
LIGHT NUCLEI
MAGNETIC RESONANCE
MELTING
MICROSCOPY
NUCLEAR MAGNETIC RESONANCE
NUCLEI
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
PHASE TRANSFORMATIONS
POLYETHYLENE GLYCOLS
POLYMERS
RESONANCE
SCANNING ELECTRON MICROSCOPY
SCATTERING
SPECTROSCOPY
STABLE ISOTOPES
SUBLIMATION
SURFACE COATING
SYNTHESIS
X-RAY DIFFRACTION
X-RAY SPECTROSCOPY