Synthesis and characterization of volatile bismuth [beta]-diketonate compounds for metal-organic chemical vapor deposition of thin films

Journal Article · · Chemistry of Materials; (United States)

DOI:https://doi.org/10.1021/cm00022a030· OSTI ID:7168046

Brooks, K C ^[1]; Turnipseed, S B; Barkley, R M; Sievers, R E ^[2]; Tulchinsky, V; Kaloyeros, A E ^[3]

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1. Univ. of Illinois, Urbana, IL (United States)
2. Univ. of Colorado, Boulder, CO (United States)
3. SUNY, Albany, NY (United States)

The synthesis of several new Bi(III) [beta]-diketonate complexes is described. In this method the chelates of the anions of 6,6,7,7.8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedione (H(fod)) and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H(hfa)) are formed by refluxing 3 equiv of the protonated ligand with 1 equiv of triphenylbismuth. The same reaction with 1,1,1-trifluoro-2,4-pentanedione (H(tfa)) produced a mixed [beta]-diketonate/phenyl ligand complex. The reaction products were characterized by thermogravimetric analysis, mass spectroscopy, nuclear magnetic resonance spectrometry, and gas chromatography/mass spectroscopy. Formation of bismuth-containing thin films using metal-organic chemical vapor deposition was demonstrated using the Bi(III) complex of fod. The films produced using this method were determined to contain 76% bismuth by Auger analysis, and no fluorine contamination was observed. 18 refs., 6 figs., 1 tab.

• OSTI ID: 7168046
• Journal Information: Chemistry of Materials; (United States), Journal Name: Chemistry of Materials; (United States) Vol. 4:4; ISSN CMATEX; ISSN 0897-4756
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
AUGER ELECTRON SPECTROSCOPY
BISMUTH
BISMUTH COMPLEXES
CHEMICAL ANALYSIS
CHEMICAL COATING
CHEMICAL PREPARATION
CHEMICAL VAPOR DEPOSITION
COMPLEXES
DEPOSITION
ELECTRON SPECTROSCOPY
ELEMENTS
GRAVIMETRIC ANALYSIS
KETONES
MAGNETIC PROPERTIES
MASS SPECTROSCOPY
METALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
PHYSICAL PROPERTIES
QUANTITATIVE CHEMICAL ANALYSIS
SPECTROSCOPY
STRUCTURAL CHEMICAL ANALYSIS
SURFACE COATING
SYNTHESIS
THERMAL ANALYSIS
THERMAL GRAVIMETRIC ANALYSIS