Microprobe characterization of sputtered high T/sub c/ superconducting films on silicon
Conference
·
· AIP Conf. Proc.; (United States)
OSTI ID:7127776
High T/sub c/ superconducting thin films on silicon substrates were prepared and characterized. Thin films were deposited by RF diode sputtering from a single compound target. Microprobe anlysis using Auger Electron Spectroscopy (AES), Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray Spectrometry (EDXS) was used to characterize the structure and the composition. A severe interaction between the silicon substrate and the film was observed. A sputtered zirconium oxide film was studied as an interdiffusion barrier on the silicon substrate. The best film on Si with a ZrO/sub 2/ barrier layer has T/sub c/ (midpoint) = 88K and transition width = 8K with some tail.
- Research Organization:
- Textronix, Inc. Beaverton, OR 97077
- OSTI ID:
- 7127776
- Report Number(s):
- CONF-871178-
- Conference Information:
- Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 165:1
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
COUPLING
CRYSTAL STRUCTURE
DIFFUSION
DIODE TUBES
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELECTRON TUBES
ELEMENTS
FILMS
LAYERS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
POTENTIALS
RF SYSTEMS
SCANNING ELECTRON MICROSCOPY
SEMIMETALS
SILICON
SORPTIVE PROPERTIES
SPECTRA
SPECTROSCOPY
SPUTTERING
SUPERCONDUCTING FILMS
SURFACE PROPERTIES
THERMIONIC DIODES
THERMIONIC TUBES
TRANSITION ELEMENT COMPOUNDS
X-RAY SPECTRA
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
COUPLING
CRYSTAL STRUCTURE
DIFFUSION
DIODE TUBES
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELECTRON TUBES
ELEMENTS
FILMS
LAYERS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
POTENTIALS
RF SYSTEMS
SCANNING ELECTRON MICROSCOPY
SEMIMETALS
SILICON
SORPTIVE PROPERTIES
SPECTRA
SPECTROSCOPY
SPUTTERING
SUPERCONDUCTING FILMS
SURFACE PROPERTIES
THERMIONIC DIODES
THERMIONIC TUBES
TRANSITION ELEMENT COMPOUNDS
X-RAY SPECTRA
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES