Layer-by-layer deposition of La sub 1. 85 Sr sub 0. 15 CuO sub x films by pulsed laser ablation

Journal Article · Mon Jun 15 04:00:00 EDT 1992 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.106778· OSTI ID:7111262

Chern, M Y; Gupta, A; Hussey, B W ^[1]

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1. IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598 (United States)

Reflection high-energy electron diffraction (RHEED) has been used to monitor the growth of La{sub 1.85}Sr{sub 0.15}CuO{sub {ital x}} (LSCO) thin films on (100) SrTiO{sub 3} substrates by pulsed laser deposition. The films are grown using a combination of pulsed molecular oxygen and a continuous source of atomic oxygen, with the average background pressure maintained as low as 1 mTorr. The RHEED pattern is sharp and streaky, and the intensity of the specular beam oscillates during the deposition, indicating a two-dimensional layer-by-layer epitaxial growth. The film thickness measured by x-ray small-angle interference is consistent with the thickness determined by the RHEED oscillation period with a growth unit of half a unit cell. Thin films of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) with good RHEED oscillations have also been grown under similar oxygenation conditions. The low-pressure-grown LSCO and YBCO films are superconducting, with zero-resistance temperatures of 15 and 80 K, respectively.

• OSTI ID: 7111262
• Journal Information: Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 60:24; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ABLATION
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
ELECTROMAGNETIC RADIATION
ELECTRON DIFFRACTION
EPITAXY
HIGH-TC SUPERCONDUCTORS
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
LASER RADIATION
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
RARE EARTH COMPOUNDS
SCATTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTORS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS