Synchrotron radiation assisted deposition of aluminum oxide from condensed layers of trimethylaluminum and water at 78 K

Journal Article · Mon Aug 10 04:00:00 EDT 1992 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.107781· OSTI ID:7111124

Strongin, D R; Moore, J F ^[1]; Ruckman, M W ^[2]

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1. Department of Chemistry, State University of New York, Stony Brook, New York 11794 (United States)
2. Physics Department, Brookhaven National Laboratory, Upton, New York 11973 (United States)

Spectroscopic evidence is presented that shows that synchrotron irradiation of trimethylaluminum (TMA) and water at 78 K on a silver substrate produces pure layers of aluminum oxide. Near-edge x-ray absorption fine structure and core level photoelectron spectroscopies are used to characterize the Al{sub 2}O{sub 3} layer, which was 30 A thick. The carbon component in the alkylaluminum precursor is completely removed during irradiation as volatile methane product. In the absence of synchrotron radiation the molecular precursors show evidence of some interactions within the solid, but upon warming to ambient temperatures (260 K) the adsorbed layers desorb from the substrate.

• DOE Contract Number: AC02-76CH00016
• OSTI ID: 7111124
• Journal Information: Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 61:6; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
665300 -- Interactions Between Beams & Condensed Matter-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION SPECTRA
ALLOYS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BREMSSTRAHLUNG
CARBON ADDITIONS
CHALCOGENIDES
CONTAMINATION
DEPOSITION
DESORPTION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
FILMS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RADIATIONS
SORPTION
SPECTRA
SPECTROSCOPY
SYNCHROTRON RADIATION
TEMPERATURE EFFECTS
X-RAY SPECTRA