Influences of noble gases (Ne, Ar, and Kr) on magnetic properties of ion-beam-sputtered Fe/SiO sub 2 multilayer films

Journal Article · Mon Jan 01 04:00:00 EST 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577046· OSTI ID:7103367

Senda, M; Nagai, Y ^[1]

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1. NTT Applied Electronics Laboratories, Tokai, Ibaraki 319-11, Japan (JP)

This paper investigates the sputter gas (Ne, Ar, and Kr) influences on magnetic properties of Fe/SiO{sub 2} multilayer film. The magnetostriction changes due to Fe layer thickness are strongly dependent on sputter gas species. This phenomenon cannot be explained only by Fe crystal orientation change. X-ray photoelectron spectroscopy analysis indicates the magnetostriction change is also related to the Fe--Si-O mixed state formed between Fe and SiO{sub 2} layers, and to the thickness of the region. Ne improves the soft-magnetic properties of Fe/SiO{sub 2} film, but Kr deteriorates the properties. This result is thought to be caused by the difference in magnetic anisotropy dispersion due to Fe crystal grain size. Saturation magnetization of 1.72 T, hard-axis coercivity of 0.3 Oe, and relative permeability (at 5 MHz) of more than 5000 are achieved under nearly zero magnetostriction in Ne{sub 80}Ar{sub 20} ion-beam-sputtered Fe/SiO{sub 2} (10/2.5 nm) film, with no post annealing.

• OSTI ID: 7103367
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:1; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603 -- Materials-- Properties
640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
ARGON
BEAMS
CHALCOGENIDES
ELEMENTS
FLUIDS
GASES
ION BEAMS
IRON
KRYPTON
MAGNETIC PROPERTIES
MAGNETOSTRICTION
METALS
MINERALS
NEON
NONMETALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
SILICA
SILICON COMPOUNDS
SILICON OXIDES
SPUTTERING
TRANSITION ELEMENTS