Dependence of magnetostriction of sputtered Tb-Fe films on preparation conditions

Conference · Mon Nov 01 04:00:00 EST 1993 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:6822577

Hayashi, Y; Arai, K I; Ishiyama, K; Yamaguchi, M ^[1]; Honda, T ^[2]

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1. Tohoku Univ., Sendai (Japan). Research Institute of Electrical Communication
2. Tokin Corp., Sendai (Japan). Sendai Research Lab.

Amorphous Tb-Fe thin films prepared by sputtering method in the compositional range Tb[sub x]Fe[sub 1[minus]x] (x = 0--0.5) have been investigated in view of their potential for use in electromagnetic thin film actuators. The authors examined the magnetostriction and the coercive force for the Tb-Fe films for different sputtering conditions to obtain both soft magnetic properties 2nd large magnetostriction in this system. As a result, they obtained Tb-Fe thin films having large magnetostrictions (180[times]10[sup [minus]6] at 1kOe) and low coercive force (60--70 Oe). These films were prepared under the conditions of the composition of 45--50at%Tb, Ar gas pressure of 4mTorr, rf input power of 200W and using water cooled substrates. A trial actuator using magnetostrictive thin films is also reported.

• OSTI ID: 6822577
• Report Number(s): CONF-930416--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 29:6Pt1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
42 ENGINEERING
420200 -- Engineering-- Facilities
Equipment
& Techniques
ACTUATORS
ALLOYS
DATA
EXPERIMENTAL DATA
INFORMATION
IRON ALLOYS
IRON BASE ALLOYS
MAGNETIC PROPERTIES
MAGNETOSTRICTION
MATERIALS
NUMERICAL DATA
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
TERBIUM ALLOYS