A statistical study of the combined effects of substrate temperature, bias, annealing, and a Cr/sub 3/Si/sub 2/ undercoating on the tribological properties of rf-sputtered MoS/sub 2/ coatings

Conference · Thu Jan 01 04:00:00 EST 1987

OSTI ID:7077007

Panitz, J K.G.; Pope, L E; Hills, C R; Lyons, J E; Staley, D J

We have completed a study of the effects of (1) substrate temperature, (2) substrate bias, (3) post-deposition annealing, and (4) the presence of a Cr/sub 3/Si/sub 2/ undercoating on the tribological properties of 300 to 500 nm thick MoS/sub 2/ coatings which were rf-sputter deposited on annealed 304 stainless steel substrates. It was determined that a Cr/sub 3/Si/sub 2/ undercoating and substrate bias are the most important individual factors in order to obtain MoS/sub 2/ coatings with low coefficients of friction, 0.07. The highest coefficients of friction, 0.12, occurred for coatings which were not heated during deposition nor annealed afterwards and which were deposited onto substrates that were not biased during deposition or precoated with Cr/sub 3/Si/sub 2/. Coatings which were deposited onto substrates that were precoated with Cr/sub 3/Si/sub 2/, subjected to deposition temperatures of 300/sup 0/C, biased during deposition and annealed afterwards were able to withstand the most wear. The best MoS/sub 2/ coatings with regards to both coefficient of friction and wear occur over a broad range of substrate biases from -50 to -100 V. Transmission electron microscopy indicates that there are significant differences in the morphology of the MoS/sub 2/ coatings which occur in conjunction with the different deposition conditions studied.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 7077007
• Report Number(s): SAND-86-2555C; CONF-870388-2; ON: DE87007086
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ALLOYS
CHALCOGENIDES
CHROMIUM ALLOYS
CHROMIUM COMPOUNDS
CHROMIUM SILICIDES
CHROMIUM STEELS
CHROMIUM-NICKEL STEELS
COATINGS
CORROSION RESISTANT ALLOYS
DEPOSITION
ELECTRON MICROSCOPY
FRICTION
HEAT RESISTANT MATERIALS
HEAT RESISTING ALLOYS
IRON ALLOYS
IRON BASE ALLOYS
MATERIALS
MECHANICAL PROPERTIES
MICROSCOPY
MOLYBDENUM COMPOUNDS
MOLYBDENUM SULFIDES
NICKEL ALLOYS
REFRACTORY METAL COMPOUNDS
SILICIDES
SILICON COMPOUNDS
STAINLESS STEEL-304
STAINLESS STEELS
STEELS
SUBSTRATES
SULFIDES
SULFUR COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
TRIBOLOGY
WEAR RESISTANCE