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Tribological properties of rf-sputtered MoS/sub 2/ coatings

Technical Report ·
OSTI ID:5955959
We completed a two-part study of the effects of: (1) substrate temperature; (2) substrate bias; (3) post-deposition annealing; and (4) the presence of a Cr/sub 3/Si/sub 2/ undercoating on the tribological properties of 300 to 500 nm MoS/sub 2/ coatings which were deposited on annealed 304 stainless steel substrates. We used two-level factorial statistical analysis to identify the relative importance of and parametric interactions between the above parameters. A Cr/sub 3/Si/sub 2/ undercoating and substrate bias are the most important individual factors in order to obtain MoS/sub 2/ coatings with low coefficients of friction, 0.07, in lab air. The highest coefficients of friction, 0.12, occurred for coatings which were not heated during deposition nor annealed afterwards and which were deposited onto substrates that were not biased during deposition or precoated with Cr/sub 3/Si/sub 2/. The coatings which were deposited onto substrates that were precoated with Cr/sub 3/Si/sub 2/, subjected to deposition temperatures of 300/sup 0/C, biased during deposition and annealed afterwards were the most wear resistant. In the second part of this study, we used the three deposition conditions that resulted in superior MoS/sub 2/ coatings (300/sup 0/C substrate temperature, a Cr/sub 3/Si/sub 2/ underlayer and post-deposition vacuum annealing) and systematically varied the substrate bias from 0 V to -150 V to determine the optimal bias voltage. This indicated the best MoS/sub 2/ coatings with regards to both the coefficient of friction and wear life occurred for substrate biases ranging from -50 to -100 V. 18 refs., 6 figs., 1 tab.
Research Organization:
Sandia National Labs., Albuquerque, NM (USA)
DOE Contract Number:
AC04-76DP00789
OSTI ID:
5955959
Report Number(s):
SAND-86-2825; ON: DE88000266
Country of Publication:
United States
Language:
English