Synthesis and friction behavior of chemically vapor deposited composite coatings containing discrete TiN and MoS{sub 2} phases

Journal Article · Mon Apr 01 04:00:00 EST 1996 · Journal of the American Ceramic Society

DOI:https://doi.org/10.1111/j.1151-2916.1996.tb08511.x· OSTI ID:247901

Bae, Y W; Lee, W Y; Yust, C S; Blau, P J; Besmann, T M ^[1]

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1. Oak Ridge National Lab., TN (United States)

Composite coatings containing discrete crystalline phases of TiN and MoS{sub 2} were deposited on Si, graphite, and Ti-6Al-4V alloy substrates by simultaneous chemical vapor deposition. MoF{sub 6} and H{sub 2}S were utilized as the precursors for MoS{sub 2} formation, while Ti((CH{sub 3}){sub 2}N){sub 4} and NH{sub 3} were used for TiN deposition. The composition and microstructure of the coatings were investigated by X-ray diffraction, Auger electron spectroscopy, and transmission electron microscopy. The molar ratios of TiN and MoS{sub 2} in the composite microstructure could be controlled by adjusting the MoF{sub 6} concentration in the reagent mixture. Encouraging friction and wear characteristics against silicon nitride were obtained for a composite coating which was rich in MoS{sub 2} at the coating surface, with TiN as the major phase near the substrate interface. Friction coefficients at room temperature in air were typically in the range of 0.07 to 0.3. The friction coefficients remained comparable at 573 K, but increased to 0.7 to 1.0 at 673 K. A friction coefficient value of {approximately}0.3 was, however, obtained from a composite coating tested at 973 K.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 247901
• Journal Information: Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 4 Vol. 79; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM ALLOYS
AMMONIA
AUGER ELECTRON SPECTROSCOPY
CHEMICAL VAPOR DEPOSITION
COMPOSITE MATERIALS
GRAPHITE
HARDNESS
HYDROGEN SULFIDES
MICROSTRUCTURE
MOLYBDENUM FLUORIDES
MOLYBDENUM SULFIDES
ORGANOMETALLIC COMPOUNDS
SILICON
TITANIUM ALLOYS
TITANIUM NITRIDES
TRANSMISSION ELECTRON MICROSCOPY
VANADIUM ALLOYS
WEAR RESISTANCE
X-RAY DIFFRACTION