Microstructure of cubic boron nitride thin films grown by ion-assisted pulsed laser deposition

Journal Article · Fri Jul 01 00:00:00 EDT 1994 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.357143· OSTI ID:7045027

Medlin, D L; Friedmann, T A; Mirkarimi, P B ^[1]; Rez, P ^[2]; Mills, M J; McCarty, K F ^[1]

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1. Sandia National Laboratories, Livermore, California 94551 (United States)
2. Department of Physics and Center for Solid State Science, Arizona State University, Tempe, Arizona 85287 (United States)

A microstructural study of boron nitride films grown by ion-assisted pulsed laser deposition is presented. Fourier transform infrared spectroscopy, electron-energy-loss spectroscopy, and electron-diffraction measurements indicate that within the ion-irradiated region on the substrate, the film consists of a high fraction of the cubic phase ([ital c]BN) with a small amount of the turbostratic phase; outside the irradiated region, only the turbostratic phase is detected. Conventional and high-resolution electron microscopic observations show that the [ital c]BN is in the form of twinned crystallites, up to 40 nm in diameter. Particulates, formed by the laser ablation process, reduce the yield of [ital c]BN in the irradiated regions by shadowing local areas from the ion beam. The films exhibit a layered structure with an approximately 30-nm-thick layer of oriented turbostratic material forming initially at the silicon substrate followed by the [ital c]BN. The observations of oriented turbostratic material and twinned [ital c]BN crystallites are discussed in relation to a previously proposed compressive stress-induced mechanism for [ital c]BN synthesis by ion-assisted film deposition.

• DOE Contract Number: AC04-94AL85000
• OSTI ID: 7045027
• Journal Information: Journal of Applied Physics; (United States), Vol. 76:1; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BORON NITRIDES
THIN FILMS
MICROSTRUCTURE
ABLATION
ELECTRON DIFFRACTION
INFRARED SPECTRA
LASER RADIATION
PHASE STUDIES
TWINNING
BORON COMPOUNDS
COHERENT SCATTERING
DIFFRACTION
ELECTROMAGNETIC RADIATION
FILMS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
RADIATIONS
SCATTERING
SPECTRA
360606* - Other Materials- Physical Properties- (1992-)