Infrared studies of the surface and gas phase reactions leading to the growth of titanium nitride thin films from tetrakis (dimethylamido) titanium and ammonia

Journal Article · Mon Nov 30 23:00:00 EST 1992 · Journal of the Electrochemical Society; (United States)

DOI:https://doi.org/10.1149/1.2087327· OSTI ID:7034310

Dubois, L H; Zegarski, B R ^[1]; Girolami, G S ^[2]

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1. AT and T Bell Labs., Murray Hill, NJ (United States)
2. Illinois Univ., Urbana, IL (United States). Materials Research Lab.

In this paper, the reaction of tetrakis (dimethylamido) titanium (Ti(NME[sub 2])[sub 4]) with ammonia is studied in the gas phase and on titanium disilicide, aluminum, and copper surfaces using infrared spectroscopy. In the gas phase the main product of this reaction, dimethylamine, forms rapidly even at 300 K, and a fine yellow powder is deposited on the windows of the IR cell. Under ultrahigh vacuum conditions there is no reaction between Ti(NMe[sub 2])[sub 4] and NH[sub 3] on any of the three surfaces studied at temperatures between 300 and 650 K. Heating pure Ti(NMe[sub 2])[sub 4] to temperatures [gt] 550K in the gas phase, leads to species that contain Ti-N-C metallacycles and N=C double bonds. The thermal decomposition of Ti(NMe[sub 2])[sub 4] on both TiSi[sub 2] and Al surfaces at temperatures up to 650 K yields films that contain titanium, nitrogen, and a significant amount of carbon. No decomposition is observed on copper; instead, molecular desorption occurs below 400 K. The authors' observations are compared with the known thermal chemistry of titanium dialkylamides in solution.

• DOE Contract Number: FG02-91ER45439
• OSTI ID: 7034310
• Journal Information: Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 139:12; ISSN 0013-4651; ISSN JESOAN
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
664200 -- Spectra of Atoms & Molecules & their Interactions with Photons-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
AMIDES
AMMONIA
CHEMICAL REACTION KINETICS
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
INFRARED SPECTRA
KINETICS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
PHASE STUDIES
PHYSICAL PROPERTIES
PNICTIDES
PRECURSOR
REACTION KINETICS
SPECTRA
TEMPERATURE RANGE
TEMPERATURE RANGE 0400-1000 K
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
ULTRAHIGH VACUUM