Effects of nitrogen doping on the growth and properties of plasma-enhanced chemical-vapor-deposited diamond-like-carbon films

Journal Article · Wed Jun 01 00:00:00 EDT 1994 · Journal of Electronic Materials (A.I.M.E. Metallurgical Society); (United States)

DOI:https://doi.org/10.1007/BF02670661· OSTI ID:7020433

Sreenivas, G; Ang, S S; Brown, W D ^[1]

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1. Univ. of Arkansas, Fayetteville, AR (United States)

Nitrogen-doped diamond-like carbon (DLC) or amorphous hydrogenated carbon (a-C:H) films were grown by plasma enhanced chemical vapor deposition using methane and nitrogen gases as precursors. The effects of nitrogen trifluoride (NF[sub 3]) on these nitrogen-doped DLC films were also investigated. The deposition rate decreases sharply with the addition of nitrogen in the absence of NF[sub 3] due to dilution, while it increases in the presence of NF[sub 3] due, presumably, to the reduction of activated hydrogen species by the fluorine radical (F[sup [minus]]). X-ray photoelectron spectra reveal a nitrogen concentration in the range of 9.3 to 13.8% in these DLC films with a C 1s electron binding energy of 287-288 eV, indicating the diamond-like structure. Infrared spectra of DLC films indicate the presence of amino groups (N-H) and nitrile and/or isonitrile (C [triple bond] V N) groups giving strong evidence of sp carbon. Diamond like carbon films deposited in CH[sub 4] + N[sub 2] (with and without NF[sub 3]) have a lower refractive index, a lower bulk resistivity, and a lower optical bandgap than films deposited using CH[sub 4] due to a lower hydrogen content in the films. 19 refs., 12 figs., 3 tabs.

• OSTI ID: 7020433
• Journal Information: Journal of Electronic Materials (A.I.M.E. Metallurgical Society); (United States), Journal Name: Journal of Electronic Materials (A.I.M.E. Metallurgical Society); (United States) Vol. 23:6; ISSN JECMA5; ISSN 0361-5235
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
360606 -- Other Materials-- Physical Properties-- (1992-)
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102 -- Chemical & Spectral Procedures
ALKANES
AMORPHOUS STATE
ANNEALING
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COMPILED DATA
CRYSTAL DOPING
DATA
DEPOSITION
DIAMONDS
ELECTRICAL PROPERTIES
ELECTRON SPECTROSCOPY
ELEMENTAL MINERALS
ELEMENTS
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
HYDROCARBONS
INFORMATION
INFRARED SPECTRA
METHANE
MINERALS
NITROGEN
NITROGEN COMPOUNDS
NITROGEN FLUORIDES
NONMETALS
NUMERICAL DATA
OPTICAL PROPERTIES
ORGANIC COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL PROPERTIES
PLASMA
RADICALS
SPECTRA
SPECTROSCOPY
SURFACE COATING
X-RAY SPECTROSCOPY