Single-target magnetron sputter deposition of high-T/sub c/ superconducting Bi-Sr-Ca-Cu-O thin films
Journal Article
·
· J. Appl. Phys.; (United States)
Single-target RF magnetron sputtering was used to deposit superconducting thin films of Bi-Sr-Ca-Cu-O with a T/sub c//sub 0/ above 80 K. Varying P/sub =/ modified the concentrations of Bi, Cu, and O in the films by 10%--20%. Higher annealing temperatures, especially with brief melting, favored the formation of the higher T/sub c/ phases. Tetragonal phases (6- and 75-K T/sub c/ ), with a = 3.8097 A, c = 24.607 A, and Bi/sub 2/ Sr/sub 2/ CuO/sub 6/ composition, and a = 3.812 A, c = 30.66 A, and Bi/sub 2/ Sr/sub 2-//sub x/ Ca/sub 1+//sub x/ Cu/sub 2/ O/sub 8/ composition, were identified. 70--84 K films contained large proportions of a new tetragonal phase, with a = 3.81 A and c = 55.23 A.
- Research Organization:
- Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
- OSTI ID:
- 7016439
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:10; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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· AIP Conference Proceedings (American Institute of Physics); (USA)
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OSTI ID:6948885
Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL LATTICES
CRYSTAL STRUCTURE
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
TETRAGONAL LATTICES
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL LATTICES
CRYSTAL STRUCTURE
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
TETRAGONAL LATTICES
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE