Preparation of superconducting Bi-Ca-Sr-Cu-O thin films by rf magnetron sputtering
Superconducting thin films of Bi-Ca-Sr-Cu oxide, with T/sub c/ onset of approximately 90K, have been prepared by rf magnetron sputtering on sapphire with and without a CaZrO/sub 3/ buffer layer, ZrO/sub 2/-coated silicon (111), as well as on single crystal MgO (100). Sintered pellets of Bi/sub 2/CaSr/sub 2/Cu/sub 2/O/sub 8+x/ (2122) and Bi/sub 4/Ca/sub 3/Sr/sub 3/Cu/sub 4/O/sub 16+x/ (4334) were employed as targets. The as-deposited films were amorphous insulators which were then annealed in various ways. Zero resistance at 72K for films on (100) MgO was achieved after annealing in air at 810/sup 0/C for 2 hr. However, the X-ray diffraction pattern showed that two superconducting phases, i.e. Bi/sub 2/CaSr/sub 2/Cu/sub 2/O/sub 8+x/ (2122) and Bi/sub 2/Ca/sub x/Sr/sub 2-x/CuO/sub 6+y/ (2021), are present, and that films have preferred orientation with c-axis normal to the substrates.
- Research Organization:
- 6958000
- OSTI ID:
- 6086615
- Report Number(s):
- CONF-880812-
- Journal Information:
- IEEE Trans. Magn.; (United States), Journal Name: IEEE Trans. Magn.; (United States) Vol. 25:2; ISSN IEMGA
- Country of Publication:
- United States
- Language:
- English
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71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BISMUTH COMPOUNDS
BISMUTH OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CORUNDUM
CRYSTALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MINERALS
MONOCRYSTALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
PHYSICAL PROPERTIES
SAPPHIRE
SINTERING
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TARGETS
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES