Fabricating amorphous silicon solar cells by varying the temperature of the substrate during deposition of the amorphous silicon layer
Patent
·
OSTI ID:6981559
An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.
- Assignee:
- Rca Corp
- Patent Number(s):
- US 4339470
- OSTI ID:
- 6981559
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CONTROL
CONVERSION
DC SYSTEMS
DEPOSITION
DIRECT ENERGY CONVERSION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ENERGY CONVERSION
ENERGY SYSTEMS
EQUIPMENT
FABRICATION
FILL FACTORS
GLOW DISCHARGES
GRADED BAND GAPS
HYDRIDES
HYDROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC CONVERSION
POWER SYSTEMS
RF SYSTEMS
SILANES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
TEMPERATURE CONTROL
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CONTROL
CONVERSION
DC SYSTEMS
DEPOSITION
DIRECT ENERGY CONVERSION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC DISCHARGES
ENERGY CONVERSION
ENERGY SYSTEMS
EQUIPMENT
FABRICATION
FILL FACTORS
GLOW DISCHARGES
GRADED BAND GAPS
HYDRIDES
HYDROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC CONVERSION
POWER SYSTEMS
RF SYSTEMS
SILANES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
TEMPERATURE CONTROL