Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer

Patent · 31 December 1981

OSTI ID:864267

Carlson, David E ^[1]

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1. Yardley, PA

An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.

• Research Organization: National Renewable Energy Laboratory (NREL), Golden, CO
• DOE Contract Number: EG-77-C-01-4042
• Assignee: RCA Corporation (New York, NY)
• Patent Number(s): US 4339470
• OSTI ID: 864267
• Country of Publication: United States
• Language: English

Related Subjects

/438/136/427/
accordance
amorphous
amorphous silicon
cells
compared
constant
deposition
described
efficiencies
fabricating
fabricating amorphous
factors
fill
fill factor
fill factors
improved
improved process
increased
increased efficiencies
layer
manufactured
process
rate temperature
shown
silicon
silicon layer
silicon solar
solar
solar cell
solar cells
substrate
substrate temperature
temperature
varied
varying