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Low-temperature preparation of superconducting YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ films on Si, MgO, and SrTiO/sub 3/ by thermal coevaporation

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.100647· OSTI ID:6979175
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We used simple thermal coevaporation of yttrium, barium, and copper in an oxygen atmosphere to produce thin films of the 90 K superconductor, YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/, on silicon, magnesium oxide, and strontium titanate. The films were deposited on 650 /sup 0/C substrates and were superconducting when removed from the evaporator. A short post-anneal at 480 /sup 0/C produced films on bare Si with transition temperatures (R = 0) of 85 K. Films as thin as 0.13 ..mu..m, superconducting at 91 K (on MgO) and 89 K (on SrTiO/sub 3/), were obtained with no post-anneal.
Research Organization:
Physik Department E10, Technische Universitaet Muenchen, 8046 Garching, Federal Republic of Germany
OSTI ID:
6979175
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:10; ISSN APPLA
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
ELEMENTS
EVAPORATION
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INFORMATION
LOW TEMPERATURE
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VACUUM COATING
VACUUM EVAPORATION
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES