Effect of stoichiometry and post-annealing conditions on magnetron sputtered films of YBa/sub 2/Cu/sub 3/O/sub 7/ on cubic zirconia
Journal Article
·
· J. Appl. Phys.; (United States)
High-quality YBa/sub 2/Cu/sub 3/O/sub 7/ films supported on yttrium stabilized cubic zirconia were made by simultaneous reactive magnetron sputtering using yttrium, barium, and copper metal targets. Superconductivity onsets of 92 K with transition widths of 1.5 K (10%--90%) have been achieved on yttrium stabilized cubic zirconia substrates. Various aspects of the deposition processes are described and the effect of deposition parameters and post-annealing on thin-film stoichiometry, structure, and superconducting properties is discussed.
- Research Organization:
- Department of Applied Science, Brookhaven National Laboratory, Upton, New York 11973
- OSTI ID:
- 6566029
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 65:4; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
INFORMATION
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES