Effect of stoichiometry and post-annealing conditions on magnetron sputtered films of YBa/sub 2/Cu/sub 3/O/sub 7/ on cubic zirconia

Journal Article · Wed Feb 15 00:00:00 EST 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342932· OSTI ID:6566029

Wiesmann, H; Chen, D H; Sabatini, R L; Hurst, J; Ochab, J; Ruckman, M W

High-quality YBa/sub 2/Cu/sub 3/O/sub 7/ films supported on yttrium stabilized cubic zirconia were made by simultaneous reactive magnetron sputtering using yttrium, barium, and copper metal targets. Superconductivity onsets of 92 K with transition widths of 1.5 K (10%--90%) have been achieved on yttrium stabilized cubic zirconia substrates. Various aspects of the deposition processes are described and the effect of deposition parameters and post-annealing on thin-film stoichiometry, structure, and superconducting properties is discussed.

• Research Organization: Department of Applied Science, Brookhaven National Laboratory, Upton, New York 11973
• OSTI ID: 6566029
• Journal Information: J. Appl. Phys.; (United States), Vol. 65:4
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
SPUTTERING
STOICHIOMETRY
TRANSITION TEMPERATURE
COPPER OXIDES
SUPERCONDUCTING FILMS
FABRICATION
YTTRIUM OXIDES
ZIRCONIUM OXIDES
VAPOR DEPOSITED COATINGS
ANNEALING
EXPERIMENTAL DATA
MAGNETRONS
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
HEAT TREATMENTS
INFORMATION
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity