Characterization of Pb(Zr,Ti)O/sub 3/ thin films deposited from multielement metal targets

Journal Article · Mon Aug 01 04:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341822· OSTI ID:6976713

Sreenivas, K; Sayer, M

Lead zirconate titanate (Pb(Zr,Ti)O/sub 3/ or PZT) thin films have been grown by sputtering a multi-element metal target in oxygen using dc planar magnetron sputtering. Growth parameters and annealing conditions have been optimized. The kinetics of reactive sputtering and the implications of sputtering parameters on film composition have been studied. The studies reveal the requirement for operation at low substrate temperatures (200 /sup 0/C), high sputtering pressures (4--5 Pa), and a large substrate-to-target distance (10 cm) for obtaining good control over composition. The structural and electrical properties of films were found to depend on the compositional ratio of Zr/Ti, similar to that observed in bulk PZT ceramics. Films having a resistivity of 10/sup 10/ ..cap omega.. cm and a dielectric constant epsilon'approx.820 at room temperature (300 K) have been achieved. Ferroelectric hysteresis loop measurements indicated a remanent polarization of 30.0 ..mu..C/cm/sup 2/ and coercive field of 25 kV/cm for the rhombohedral phase composition (Zr/Ti = 58/42). Piezoelectric activity in the films is reported for the first time, through the fabrication of a surface-acoustic-wave delay line on a poled polycrystalline PZT thin film.

• Research Organization: Department of Physics, Queen's University, Kingston, Ontario K7L3N6, Canada
• OSTI ID: 6976713
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:3; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALLOYS
CHEMICAL REACTIONS
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRICITY
ENERGY BEAM DEPOSITION
FILMS
LEAD ALLOYS
OXIDATION
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PIEZOELECTRICITY
SPUTTERING
SURFACE COATING
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS