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Superconducting Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub 7-//sub x/ films on Si

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.100588· OSTI ID:6976584

By depositing YBaCuO films at low substrate holder temperatures (600 /sup 0/C) using a pulsed laser, films with the orthorhombic phase exhibiting superconductivity with high zero resistance temperatures (T/sub c//sub 0/) were produced. T/sub c//sub 0/ values as high as 50 and 80 K were seen on films deposited directly on Si and on Si with only a 50 nm ZrO/sub 2/ buffer layer, respectively. The key to the successful film deposition is the low processing temperatures involved, which minimized the interface reactions as observed by Auger electron spectrometry.

Research Organization:
Bell Communications Research, Red Bank, New Jersey 07701
OSTI ID:
6976584
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:3; ISSN APPLA
Country of Publication:
United States
Language:
English

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