Direct write with microelectronic circuit fabrication

Patent · Tue Jul 21 00:00:00 EDT 1992

OSTI ID:6976416

Drummond, T; Ginley, D

This patent describes a process for forming a pattern on a substrate by deposition of a material. It comprises depositing a suspension of colloidal particles of the material in a solvent on to a substrate by ink jet printing; evaporating the solvent, the material remaining on the substrate; laser annealing the deposited material to the substrate, the pattern being defined by the path of the laser beam; and removing excess material not annealed by the laser beam.

• Assignee: US Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 5132248; A
• Application Number: PPN: US 7-200096; TRN: 92-033628
• OSTI ID: 6976416
• Resource Relation: Patent File Date: 31 May 1988
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
MATERIALS
LASER-RADIATION HEATING
MICROELECTRONIC CIRCUITS
FABRICATION
BEAM OPTICS
COLLOIDS
EVAPORATION
SOLVENTS
SUBSTRATES
DISPERSIONS
ELECTRONIC CIRCUITS
HEATING
PHASE TRANSFORMATIONS
PLASMA HEATING
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
665300 - Interactions Between Beams & Condensed Matter- (1992-)