Real-time observations of extreme-ultraviolet aerial images by fluorescence microimaging

Journal Article · Mon Oct 31 23:00:00 EST 1994 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.587474· OSTI ID:6973255

La Fontaine, B ^[1]; White, D L ^[2]; Wood, II, O R ^[3]; MacDowell, A A; Tan, Z ^[1]; Taylor, G N ^[2]; Tennant, D M ^[3]; Hulbert, S L ^[4]

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1. AT T Bell Laboratories, 510E Brookhaven National Laboratory, Upton, New York 11973 (United States)
2. AT T Bell Laboratories, Murray Hill, New Jersey 07974 (United States)
3. AT T Bell Laboratories, Holmdel, New Jersey 07733 (United States)
4. National Synchrotron Light Source, 725B Brookhaven National Laboratory, Upton, New York 11973 (United States)

A new technique, fluorescence microimaging (FMI), using single-crystal phosphors was used to look directly at aerial images produced by an extreme-ultraviolet (EUV) camera operating at a wavelength of 139 A. The achieved spatial resolution was estimated to be [similar to]0.2 [mu]m. A comparison of this technique with the usual resist-exposure scanning electron microscopy inspection technique as a means of focusing a 20[times]EUV Schwarzschild camera was performed. FMI could in principle be improved to view fluorescent images with features as small as 0.07 [mu]m, in real time.

• OSTI ID: 6973255
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 12:6; ISSN JVTBD9; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

440600* -- Optical Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
CAMERAS
ELECTROMAGNETIC RADIATION
EXTREME ULTRAVIOLET RADIATION
FLUORESCENCE
FOCUSING
IMAGES
LUMINESCENCE
PHOSPHORS
RADIATIONS
RESOLUTION
SPATIAL RESOLUTION
ULTRAVIOLET RADIATION