Analyzing insulators by secondary-ion mass spectrometry under conditions of hydrogen inlet

Journal Article · Fri Nov 01 04:00:00 EST 1985 · J. Anal. Chem. USSR (Engl. Transl.); (United States)

OSTI ID:6968685

Fatyushina, E V; Gimel'farb, F A; Lototskii, A G; Orlov, P B

There are some specific difficulties in analyzing insulators by secondary-ion mass spectrometry, which are primarily due to the charge accumulating on the insulator during ion bombardment. In the analysis of oxide layers, the systematic errors due to surface charge are made worse by errors due to reactive secondary-ion emission. Oxygen produces additional surface oxidation and does not eliminate the errors due to surface charging. Hydrogen is a vigorous reducing agent and is also well sorbed by semiconductors and insulators. This paper describes a method of ion microanalysis for insulators under conditions of hydrogen inlet, and analytical performance is considered. A method is proposed for analyzing massive insulators and insulatormetal (semi-conductor) structures based on admitting hydrogen to the mass spectrometer chamber during bombardment by primary argon ions.

• Research Organization: State Scientific-Research and Planning Institute for the Rare-Metal Industry
• OSTI ID: 6968685
• Journal Information: J. Anal. Chem. USSR (Engl. Transl.); (United States), Journal Name: J. Anal. Chem. USSR (Engl. Transl.); (United States) Vol. 40:6, PT. 1; ISSN JACUA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ALKALI METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ARGON IONS
BEAMS
BORON COMPOUNDS
BORON OXIDES
CHALCOGENIDES
CHARGE COLLECTION
CHARGED PARTICLES
CHEMICAL ANALYSIS
CHEMICAL REACTIONS
DUOPLASMATRONS
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATORS
ELECTRON TUBES
ELEMENTS
EQUIPMENT
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HYDROGEN
ION BEAMS
ION MICROPROBE ANALYSIS
ION SOURCES
IONS
LITHIUM COMPOUNDS
LITHIUM FLUORIDES
LITHIUM HALIDES
MASS SPECTROMETERS
MASS SPECTROSCOPY
MATERIALS
MEASURING INSTRUMENTS
MICROANALYSIS
NONDESTRUCTIVE ANALYSIS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PLASMATRONS
PRESSURE EFFECTS
REDUCTION
SEMICONDUCTOR MATERIALS
SENSITIVITY
SPECTROMETERS
SPECTROSCOPY
TRANSITION ELEMENT COMPOUNDS
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES