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Analysis of the ion beam obtained from a small multicusp ion source

Conference · · Review of Scientific Instruments; (USA)
OSTI ID:6960482
; ;  [1]; ;  [2]
  1. Insitut fuer Angewandte Physik, Universitaet Frankfurt, Robert-Mayer-Strasse 2-4, D-6000 Frankurt a. M., Federal Republic of Germany (DE)
  2. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (USA)

The small multicusp ion source developed at Lawrence Berkeley Laboratory (LBL) has been equipped with a low voltage ratio, single aperture extraction system. The influence of the potential of the plasma electrode and of a dipole filter field on the beam emittance are measured. A simple method to reduce hash is suggested. The aim of these investigations is to produce nitrogen ion beams with a high atomic ion fraction and a low emittance as required for a RFQ-accelerator, which will be built for ion implantation.

OSTI ID:
6960482
Report Number(s):
CONF-890703--
Journal Information:
Review of Scientific Instruments; (USA), Journal Name: Review of Scientific Instruments; (USA) Vol. 61:1; ISSN RSINA; ISSN 0034-6748
Country of Publication:
United States
Language:
English

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