Analysis of the ion beam obtained from a small multicusp ion source
Conference
·
· Review of Scientific Instruments; (USA)
OSTI ID:6960482
- Insitut fuer Angewandte Physik, Universitaet Frankfurt, Robert-Mayer-Strasse 2-4, D-6000 Frankurt a. M., Federal Republic of Germany (DE)
- Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (USA)
The small multicusp ion source developed at Lawrence Berkeley Laboratory (LBL) has been equipped with a low voltage ratio, single aperture extraction system. The influence of the potential of the plasma electrode and of a dipole filter field on the beam emittance are measured. A simple method to reduce hash is suggested. The aim of these investigations is to produce nitrogen ion beams with a high atomic ion fraction and a low emittance as required for a RFQ-accelerator, which will be built for ion implantation.
- OSTI ID:
- 6960482
- Report Number(s):
- CONF-890703--
- Journal Information:
- Review of Scientific Instruments; (USA), Journal Name: Review of Scientific Instruments; (USA) Vol. 61:1; ISSN RSINA; ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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APERTURES
BEAM CURRENTS
BEAM EMITTANCE
BEAM EXTRACTION
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CHARGED PARTICLES
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ION BEAMS
ION IMPLANTATION
ION SOURCES
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KEV RANGE 01-10
LAWRENCE BERKELEY LABORATORY
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US DOE
US ERDA
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430200 -- Particle Accelerators-- Beam Dynamics
Field Calculations
& Ion Optics
430301* -- Particle Accelerators-- Ion Sources
APERTURES
BEAM CURRENTS
BEAM EMITTANCE
BEAM EXTRACTION
BEAMS
CHARGED PARTICLES
CURRENTS
ENERGY RANGE
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
KEV RANGE
KEV RANGE 01-10
LAWRENCE BERKELEY LABORATORY
MAGNETS
NATIONAL ORGANIZATIONS
NITROGEN IONS
OPENINGS
US AEC
US DOE
US ERDA
US ORGANIZATIONS