Beam investigations at a multicusp ion source

Journal Article · Tue Mar 31 23:00:00 EST 1992 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1142852· OSTI ID:7235488

Volk, K; Klein, H ^[1]; Leung, K N ^[2]

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1. Institut fuer Angewandte Physik der Johann Wolfgang Goethe-Universitaet, Robert-Mayer-Strasse 2-4, D-6000 Frankfurt am Main (Germany)
2. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)

In cooperation with the Lawrence Berkeley Laboratory, a multicusp ion source has been investigated. The goal of these investigations is to generate a nearly pure atomic nitrogen (N{sup +}) ion beam. To achieve this, the discharge chamber is divided into two parts of different plasma parameters by means of a filter magnetic field. As beam diagnostics, a bending magnet and a faraday cup have been used. Measurements of the beam current density and the ion composition for a wide range of discharge conditions have been performed. By using a Langmuir probe, we have performed measurements of electron temperature and electron density.

• OSTI ID: 7235488
• Journal Information: Review of Scientific Instruments; (United States), Journal Name: Review of Scientific Instruments; (United States) Vol. 63:4; ISSN RSINA; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

661220* -- Particle Beam Production & Handling
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM EXTRACTION
BEAM MONITORING
BEAM MONITORS
BEAMS
CHARGED PARTICLES
ELECTRIC PROBES
ELECTRON DENSITY
ELECTRON TEMPERATURE
FARADAY CUPS
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
LANGMUIR PROBE
MEASURING INSTRUMENTS
MONITORING
MONITORS
NITROGEN IONS
PROBES
Ta
Targets-- (1992-)