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Title: Fluidized bed for production of polycrystalline silicon

Abstract

This patent describes a method for removing silicon powder particles from a reactor that produces polycrystalline silicon by the pyrolysis of a silane containing gas in a fluidized bed reaction zone of silicon seed particles. It comprises introducing the silane containing gas stream into the reaction zone of fluidized silicon seed particles; heterogeneously decomposing the silane containing gas under conditions; collecting the silicon product particles from the collection zone; and removing silicon powder particles from the reactor.

Inventors:
Publication Date:
OSTI Identifier:
6958805
Patent Number(s):
US 5139762; A
Application Number:
PPN: US 7-551164
Assignee:
Advanced Silicon Materials, Inc., Moses Lake, WA (United States) NOV; NOV-92-047025; EDB-92-179271
Resource Type:
Patent
Resource Relation:
Patent File Date: 11 Jul 1990
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; POLYCRYSTALS; FABRICATION; SILANES; FLUIDIZED-BED COMBUSTION; SILICON; GAS FLOW; PYROLYSIS; CHEMICAL REACTIONS; COMBUSTION; CRYSTALS; DECOMPOSITION; ELEMENTS; FLUID FLOW; HYDRIDES; HYDROGEN COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; OXIDATION; SEMIMETALS; SILICON COMPOUNDS; THERMOCHEMICAL PROCESSES; 360601* - Other Materials- Preparation & Manufacture; 421000 - Engineering- Combustion Systems; 400800 - Combustion, Pyrolysis, & High-Temperature Chemistry

Citation Formats

Flagella, R.N. Fluidized bed for production of polycrystalline silicon. United States: N. p., 1992. Web.
Flagella, R.N. Fluidized bed for production of polycrystalline silicon. United States.
Flagella, R.N. 1992. "Fluidized bed for production of polycrystalline silicon". United States. doi:.
@article{osti_6958805,
title = {Fluidized bed for production of polycrystalline silicon},
author = {Flagella, R.N.},
abstractNote = {This patent describes a method for removing silicon powder particles from a reactor that produces polycrystalline silicon by the pyrolysis of a silane containing gas in a fluidized bed reaction zone of silicon seed particles. It comprises introducing the silane containing gas stream into the reaction zone of fluidized silicon seed particles; heterogeneously decomposing the silane containing gas under conditions; collecting the silicon product particles from the collection zone; and removing silicon powder particles from the reactor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 1992,
month = 8
}
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