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Silicon particle growth in a fluidized bed reactor

Conference ·
OSTI ID:5984110
This paper describes the overall chemical engineering operation of a six-inch diameter fluidized bed reactor for silicon production via silane pyrolysis. The fluidized bed reactor has been characterized by its performance data and parametric effects. A withdrawal system is used to selectively remove big particles. Seed generation is provided by a fluid jet milling device which avoids metallic grinding contamination. The silicon particle size growth is calculated from a scavenging/deposition model, which agrees with actual size measurements.
OSTI ID:
5984110
Report Number(s):
CONF-841121-
Country of Publication:
United States
Language:
English