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Silicon particle growth in a fluidized-bed reactor

Journal Article · · A.I.Ch.E. J.; (United States)
This paper describes the overall operation of a 15 cm dia. fluidized-bed reactor for silicon production via silane pyrolysis. The fluidized bed reactor has been characterized by its performance data and parametric effects. A withdrawal system is used to selectively remove big particles. Seed generation is provided by a fluid jet milling device, which avoids metallic grinding contamination. The silicon particle size growth calculated from a scavenging/deposition model agrees with actual size measurements.
Research Organization:
Jet Propulsion Lab., California Institute of Technology, Pasadena, CA 91109
OSTI ID:
5420795
Journal Information:
A.I.Ch.E. J.; (United States), Journal Name: A.I.Ch.E. J.; (United States) Vol. 33:5; ISSN AICEA
Country of Publication:
United States
Language:
English