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Title: Low resistance wavelength-reproducible [ital p]-type (Al,Ga)As distributed Bragg reflectors grown by molecular beam epitaxy

Journal Article · · Applied Physics Letters; (United States)
DOI:https://doi.org/10.1063/1.109608· OSTI ID:6952365
; ;  [1]
  1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)

We report the reproducible molecular beam epitaxial growth of Be-doped piecewise linearly graded (Al,Ga)As distributed Bragg reflectors that have vertical series resistivities near bulk values. For mirrors with three linear segments per interface, the center wavelength reproducibility is 0.1% and the series resistivity is as low as 1.8[times]10[sup [minus]5] [Omega] cm[sup 2] for hole concentrations of 5[times]10[sup 18] cm[sup [minus]3]. Measured reflectivities of 6.0% per interface are comparable to conventional single-linear-grade mirrors. Vertical-cavity surface-emitting lasers incorporating these mirrors exhibit record-low voltage thresholds of less than 1.5 V.

DOE Contract Number:
AC04-76DP00789
OSTI ID:
6952365
Journal Information:
Applied Physics Letters; (United States), Vol. 62:14; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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