Thermal conductivities of thin, sputtered optical films

Journal Article · Fri Jan 01 04:00:00 EST 1993 · Applied Optics; (United States)

DOI:https://doi.org/10.1364/AO.32.000091· OSTI ID:6949839

Henager, Jr, C H; Pawlewicz, W T ^[1]

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1. Pacific Northwest Laboratories, Battelle Memorial Institute, Battelle Boulevard, P.O. Box 999, Richland, Washington 99352 (United States)

The normal component of thin-film thermal conductivity has been measured for the first time, to the best of our knowledge, for several advanced sputtered optical materials. Included are data for single layers of boron nitride, silicon aluminum nitride, silicon aluminum oxynitride, silicon carbide, and for dielectric-enhanced metal reflectors of the form Al(SiO[sub 2]/Si[sub 3]N[sub 4])[sup [ital n]] and Al(Al[sub 2]O[sub 3]/AlN)[sup [ital n]]. Sputtered films of more conventional materials such as SiO[sub 2], Al[sub 2]O[sub 3], Ta[sub 2]O[sub 5], Ti, and Si have also been measured. The data show that thin-film thermal conductivities are typically 10 to 100 times lower than conductivities for the same materials in bulk form. Structural disorder in the amorphous or fine-grained films appears to account for most of the conductivity difference. Conclusive evidence for a film--substrate interface contribution is presented.

• OSTI ID: 6949839
• Journal Information: Applied Optics; (United States), Journal Name: Applied Optics; (United States) Vol. 32:1; ISSN APOPAI; ISSN 0003-6935
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
ALUMINIUM OXIDES
BORON COMPOUNDS
BORON NITRIDES
CARBIDES
CARBON COMPOUNDS
CHALCOGENIDES
ELEMENTS
FILMS
INTERFACES
METALS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICON
SILICON CARBIDES
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
TANTALUM COMPOUNDS
TANTALUM OXIDES
THERMAL CONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS