Thermal conductivities of thin, sputtered optical films

Technical Report · Wed May 01 04:00:00 EDT 1991

DOI:https://doi.org/10.2172/6109768· OSTI ID:6109768

Henager, Jr, C H; Pawlewicz, W T

The normal component of the thin film thermal conductivity has been measured for the first time for several advanced sputtered optical materials. Included are data for single layers of boron nitride (BN), aluminum nitride (AIN), silicon aluminum nitride (Si-Al-N), silicon aluminum oxynitride (Si-Al-O-N), silicon carbide (SiC), and for dielectric-enhanced metal reflectors of the form Al(SiO{sub 2}/Si{sub 3}N{sub 4}){sup n} and Al(Al{sub 2}O{sub 3}/AIN){sup n}. Sputtered films of more conventional materials like SiO{sub 2}, Al{sub 2}O{sub 3}, Ta{sub 2}O{sub 5}, Ti, and Si have also been measured. The data show that thin film thermal conductivities are typically 10 to 100 times lower than conductivities for the same materials in bulk form. Structural disorder in the amorphous or very fine-grained films appears to account for most of the conductivity difference. Conclusive evidence for a film/substrate interface contribution is presented.

• Research Organization: Pacific Northwest Lab., Richland, WA (United States)
• Sponsoring Organization: DOE; DOD; USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States)
• DOE Contract Number: AC06-76RL01830
• OSTI ID: 6109768
• Report Number(s): PNL-SA-19687; ON: DE92004486; CNN: RADC F3 0602-90-F-0008
• Country of Publication: United States
• Language: English

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ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
ALUMINIUM OXIDES
BORON COMPOUNDS
BORON NITRIDES
CARBIDES
CARBON COMPOUNDS
CERAMICS
CHALCOGENIDES
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ELEMENTS
FILMS
MATERIALS
METALS
NITRIDES
NITROGEN COMPOUNDS
OPTICAL PROPERTIES
OPTICS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICON
SILICON CARBIDES
SILICON COMPOUNDS
SILICON NITRIDES
TANTALUM COMPOUNDS
TANTALUM OXIDES
THERMAL CONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS