Oriented growth of Y sub 1 Ba sub 2 Cu sub 3 O sub x thin films by dual ion beam sputtering

Conference · Wed Feb 01 00:00:00 EST 1989 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6949186

Doyle, J P; Roy, R A; Yee, D S; Cuomo, J J ^[1]

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1. IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598 (USA)

We report the deposition of crystalline as-deposited ion beam sputtered Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} thin films with orientations of (100), (001), and (110)/(103) and a method for controlling the orientation of the films. Films deposited on Al{sub 2}O{sub 3} Yttria (9%) stabilized ZrO{sub 2} typically have a near random orientation, while the films on MgO show a high degree of orientation. In addition, post deposition heat treatments at 500 C were found to reduce the room temperature resisitivity significantly, although no superconducting material, maintaining a specular surface. RBS analysis shows a variation in the composition as a function of substrate position on the platen, which indicates a re-sputtering mechanism due to highly energetic neutrals from the target surface.

• OSTI ID: 6949186
• Report Number(s): CONF-881035-; CODEN: APCPC; TRN: 90-017257
• Journal Information: AIP Conference Proceedings (American Institute of Physics); (USA), Vol. 182:1; Conference: Topical conference on high- Tc superconducting thin films, devices, and characterization, Atlanta, GA (USA), 3 Oct 1988; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
SUPERCONDUCTIVITY
COPPER OXIDES
YTTRIUM OXIDES
ALUMINIUM OXIDES
ANNEALING
ELECTRICAL PROPERTIES
FABRICATION
ION BEAMS
MAGNESIUM OXIDES
SPUTTERING
SUBSTRATES
TEMPERATURE CONTROL
THIN FILMS
ZIRCONIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
BARIUM COMPOUNDS
BEAMS
CHALCOGENIDES
CONTROL
COPPER COMPOUNDS
ELECTRIC CONDUCTIVITY
FILMS
HEAT TREATMENTS
MAGNESIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication