Deposition and annealing of ion beam sputtered Y-Ba-Cu-O superconducting films

Journal Article · Mon Jul 31 00:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.102430· OSTI ID:5973779

Bernstein, S D; Tustison, R W

Highly oriented, near-stoichiometric films of YBa/sub 2/Cu/sub 3/O/sub 7/minus//delta// have been deposited onto (100) MgO, (100) yttria-stabilized zirconia, and (110) SrTiO/sub 3/ by ion beam sputtering from a single, off-stoichiometric target. Their crystal structure and resistance behavior were found to depend on the crystallization temperature of a two-step post-deposition anneal, which was varied from 750 to 1000 /degree/C. The highest zero-resistance temperature (73 K) and degree of preferred orientation was observed for a film which was deposited on (100) MgO and annealed for a short time at 950 /degree/C.

• Research Organization: Research Division, Raytheon Company, Lexington, Massachusetts 02173(US)
• OSTI ID: 5973779
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 55:5
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CRYSTAL STRUCTURE
SUPERCONDUCTIVITY
COPPER OXIDES
STRONTIUM OXIDES
VAPOR DEPOSITED COATINGS
SUPERCONDUCTING FILMS
SPUTTERING
TITANIUM OXIDES
YTTRIUM OXIDES
ZIRCONIUM OXIDES
ANNEALING
ELECTRIC CONDUCTIVITY
EXPERIMENTAL DATA
LOW TEMPERATURE
THIN FILMS
VERY HIGH TEMPERATURE
VERY LOW TEMPERATURE
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
DATA
ELECTRICAL PROPERTIES
FILMS
HEAT TREATMENTS
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
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360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity