Deposition and annealing of ion beam sputtered Y-Ba-Cu-O superconducting films

Journal Article · Mon Jul 31 04:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.102430· OSTI ID:5973779

Bernstein, S D; Tustison, R W

Highly oriented, near-stoichiometric films of YBa/sub 2/Cu/sub 3/O/sub 7/minus//delta// have been deposited onto (100) MgO, (100) yttria-stabilized zirconia, and (110) SrTiO/sub 3/ by ion beam sputtering from a single, off-stoichiometric target. Their crystal structure and resistance behavior were found to depend on the crystallization temperature of a two-step post-deposition anneal, which was varied from 750 to 1000 /degree/C. The highest zero-resistance temperature (73 K) and degree of preferred orientation was observed for a film which was deposited on (100) MgO and annealed for a short time at 950 /degree/C.

• Research Organization: Research Division, Raytheon Company, Lexington, Massachusetts 02173(US)
• OSTI ID: 5973779
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:5; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
EXPERIMENTAL DATA
FILMS
HEAT TREATMENTS
INFORMATION
LOW TEMPERATURE
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES