Thin films of Y sub 1 Ba sub 2 Cu sub 3 O sub x deposited using three target CO-sputtering and their applications to microbridge junctions and single-element IR detectors

Conference · Wed Feb 01 04:00:00 EST 1989 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6837405

Josefowicz, J Y; Rensch, D B; Hunter, A T; Kumura, H; Clemens, B M ^[1]; Spargo, J; Wiener-Avnir, E; Kerber, G ^[2]; Wilson, J A; Jack, W D; Myroszynyk, J M; Kvaas, R E ^[3]

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1. Hughes Research Laboratories, Malibu, CA 90265 (USA)
2. Hughes Microelectronics Center, Carlsbad, CA 92008-4835 (USA)
3. Santa Barbara Research Center, Goleta, CA 93117-3090 (USA)

We have produced superconducting thin films of Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} (YBCO) on SrTiO{sub 3}, ZrO{sub 2}(Y{sub 2} O{sub 3}), and Al{sub 2}O{sub 3} having T{sub c}'s of 90 K and sharp {Delta}T{sub c}'s (0.3 K for 90% to 10% on SrTiO{sub 3} and 3.3{times}10{sup 5} A/cm{sup 2} at 78 K). Samples were fabricated in a three target magnetron co-sputtering, computer controlled system using separate BaF{sub 2}, Y, and Cu targets. Rutherford backscatterng (RBS) and resistivity measurements showed that the thickness and composition uniformity was 99% across a 2-in.-diameter substrate. Films were deposited at room temperature and were subsequently annealed in wet O{sub 2} at 850 {degree}C for 1.0 hr. Analysis of the films by x-ray diffraction indicates highly oriented crystalline structure with a and c axes perpendicular to the substrate surface for (100) SrTiO{sub 3}, and randomly oriented Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} polycrystalline structure for ZrO{sub 2} and Al{sub 2}O{sub 3}.

• OSTI ID: 6837405
• Report Number(s): CONF-881035--
• Conference Information: Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Journal Volume: 182:1
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
FABRICATION
FILMS
JOSEPHSON EFFECT
MEASURING METHODS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SAMPLE PREPARATION
SCANNING ELECTRON MICROSCOPY
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES