Thin films of Y sub 1 Ba sub 2 Cu sub 3 O sub x deposited using three target CO-sputtering and their applications to microbridge junctions and single-element IR detectors

Conference · Wed Feb 01 00:00:00 EST 1989 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6837405

Josefowicz, J Y; Rensch, D B; Hunter, A T; Kumura, H; Clemens, B M ^[1]; Spargo, J; Wiener-Avnir, E; Kerber, G ^[2]; Wilson, J A; Jack, W D; Myroszynyk, J M; Kvaas, R E ^[3]

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1. Hughes Research Laboratories, Malibu, CA 90265 (USA)
2. Hughes Microelectronics Center, Carlsbad, CA 92008-4835 (USA)
3. Santa Barbara Research Center, Goleta, CA 93117-3090 (USA)

We have produced superconducting thin films of Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} (YBCO) on SrTiO{sub 3}, ZrO{sub 2}(Y{sub 2} O{sub 3}), and Al{sub 2}O{sub 3} having T{sub c}'s of 90 K and sharp {Delta}T{sub c}'s (0.3 K for 90% to 10% on SrTiO{sub 3} and 3.3{times}10{sup 5} A/cm{sup 2} at 78 K). Samples were fabricated in a three target magnetron co-sputtering, computer controlled system using separate BaF{sub 2}, Y, and Cu targets. Rutherford backscatterng (RBS) and resistivity measurements showed that the thickness and composition uniformity was 99% across a 2-in.-diameter substrate. Films were deposited at room temperature and were subsequently annealed in wet O{sub 2} at 850 {degree}C for 1.0 hr. Analysis of the films by x-ray diffraction indicates highly oriented crystalline structure with a and c axes perpendicular to the substrate surface for (100) SrTiO{sub 3}, and randomly oriented Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} polycrystalline structure for ZrO{sub 2} and Al{sub 2}O{sub 3}.

• OSTI ID: 6837405
• Report Number(s): CONF-881035-; CODEN: APCPC; TRN: 90-017371
• Journal Information: AIP Conference Proceedings (American Institute of Physics); (USA), Vol. 182:1; Conference: Topical conference on high- Tc superconducting thin films, devices, and characterization, Atlanta, GA (USA), 3 Oct 1988; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
SUPERCONDUCTIVITY
COPPER OXIDES
YTTRIUM OXIDES
ALUMINIUM OXIDES
ELECTRICAL PROPERTIES
FABRICATION
JOSEPHSON EFFECT
MEASURING METHODS
SAMPLE PREPARATION
SCANNING ELECTRON MICROSCOPY
SPUTTERING
STRONTIUM OXIDES
THIN FILMS
TITANIUM OXIDES
TRANSITION TEMPERATURE
ZIRCONIUM OXIDES
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
ELECTRIC CONDUCTIVITY
ELECTRON MICROSCOPY
FILMS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
ZIRCONIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties