Effect of deposition rate on properties of YBa sub 2 Cu sub 3 O sub 7 minus. delta. superconducting thin films

Journal Article · Mon Apr 09 00:00:00 EDT 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.103209· OSTI ID:6948973

Wu, X D; Muenchausen, R E; Foltyn, S; Estler, R C; Dye, R C; Flamme, C; Nogar, N S; Garcia, A R; Martin, J; Tesmer, J ^[1]

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1. Exploratory Research, Los Alamos National Laboratory, Los alamos, New Mexico 87545 (USA) Development Center, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (USA)

Superconducting thin films of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} on (100) SrTiO{sub 3} are prepared {ital in} {ital situ} by a pulsed laser deposition technique at deposition rates from 1 to 145 A/s. Crystallinity of the films is examined by Rutherford backscattering in the channeling mode using a 2.2 MeV He{sup +} ion beam. The backscattering minimum yield ({chi}{sub min}) increases with the deposition rate. A {chi}{sub min} of 3% is observed in the films deposited at the lowest deposition rate. Even at a deposition rate of 145 A/s, the films show good crystallinity with {chi}{sub min} of 15%, indicating epitaxial growth. The x-ray diffraction measurements show that the films have strong {ital c}-axis orientation normal to the substrates. The films have metallic resistance versus temperature behavior with zero resistance temperatures of 90 K. The results indicate that the pulsed laser deposition technique could be used to deposit large-area films efficiently with adequate substrate movement.

• OSTI ID: 6948973
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 56:15; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BACKSCATTERING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COHERENT SCATTERING
COLLISIONS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DEPOSITION
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ENERGY RANGE
FILMS
HELIUM IONS
ION COLLISIONS
IONS
LASER RADIATION
MEV RANGE
MEV RANGE 01-10
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SCATTERING
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES