Epitaxial YBa sub 2 Cu sub 3 O sub 7 minus y thin-film growth on NdGaO sub 3 substrate by laser ablation

Journal Article · Fri Mar 01 04:00:00 EST 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.348520· OSTI ID:6194170

Mukaida, M; Miyazawa, S; Sasaura, M ^[1]; Yonezawa, H ^[2]

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1. NTT LSI Laboratories, 3-1, Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-01, Japan (JP)
2. NTT Applied Electronics Laboratories, Tokai, Ibaraki 319-11, Japan (JP)

As-grown superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital y}} thin films with various thicknesses were successfully grown on lattice-matched NdGaO{sub 3} substrates by ArF laser ablation deposition. An as-grown 2000-A-thick film has a zero-resistance temperature ({ital T}{sub {ital c}}) at 90 K and a 170-A-thick film has a {ital T}{sub {ital c}} at 88 K. The existence of a thin interfacial diffusion layer between a 170-A-thick film and the substrate was observed by Auger electron spectroscopy. Rutherford backscattering spectroscopy suggest that as-grown YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital y}} films on NdGaO{sub 3} substrates are high-quality crystals. It is demonstrated that the NdGaO{sub 3} has considerable potential as an electronic substrate material by less interfacial diffusion layer and good crystallinity of grown thin films.

• OSTI ID: 6194170
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:5; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ABLATION
ALKALINE EARTH METAL COMPOUNDS
AUGER ELECTRON SPECTROSCOPY
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTALS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
EPITAXY
FILMS
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SPECTROSCOPY
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES